[Sneap] Beam from 860A sputter source
Vaclav Vosecek
vosecek at ujf.cas.cz
Mon Apr 30 06:06:32 EDT 2007
Dear SNEAPers,
We have been operating 3.0 MeV Tandetron from HVE for a year. The ion
sources are the 358 Duoplasmatron and 860A Sputter Source. Though its
not a High Current version we have many requests for implantations.
From Sputter Source we can get current higher then 10 microamps at H,
C, O, Si and Au wihout problem at low target current. So we suppose that
the source is in a good condition. However we are not successful in
getting beam from Cu and Ag (in propotion to Middleton reported beams).
We achieve 0.8 and 0.3 microamps respectively.
At transition elements only Ti gives 1.5 microamp, other are several
times lower. We have tried compact metals as well as powders and
haven't found nearly any difference.
What is your experience with 860A Sputter Source from HVE?
Vaclav Vosecek, Nuclear Physics Institute, Rez near Prague, Czech Republic
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