[Sneap] Vibration Attenuation
NEC
nec at pelletron.com
Thu Apr 23 09:12:00 EDT 2009
TO: SNEAP < sneap at tunl.duke.edu >
SUBJECT: Vibration Attenuation
DATE: April 23, 2009
E-MAIL No. 4-9219
Chris and Ovidiu,
You are correct, NEC does manufacture a vibration isolator which was originally designed primarily for cryopumps.
Many years ago we had a problem with silicon wafers vibrating on a transfer stage of an NEC MeV implanter. Our welded bellows vibration isolator solved the problem.
Ovidiu, I will send you product specification sheets.
Regards,
Greg
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Dr. Gregory A. Norton Phone: (608) 831-7600
Vice President, Marketing Fax: (608) 831-9591
National Electrostatics Corp. E-Mail nec at pelletron.com
P.O. Box 620310 Web: http://www.pelletron.com
Middleton, WI 53562-0310 USA
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