[Sneap] High-energy implant on 150mm silicon wafers

[Young, Douglas]

I am trying to locate a lab or foundry service that can provide high-energy (500keV to 3MeV) ion implant service on 150mm silicon wafers. Species of interest include boron and phosphorous. Any leads would be greatly appreciated.

Doug Young
MIT Lincoln Laboratory
244 Wood Street
Lexington, MA 02173

Phone:781-279-0550
Email: dyoung at ll.mit.edu<mailto:dyoung at ll.mit.edu>


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